Onto Innovation

Onto Innovation is a prominent company specializing in the design, development, manufacture, and support of advanced metrology, defect inspection, lithography, and data analysis systems for microelectronics device manufacturers. The company offers a comprehensive portfolio of technologies, including un-patterned wafer quality assessment, 3D metrology for various chip features, macro defect inspection, and factory analytics. This diverse range of solutions enables Onto Innovation to collaborate effectively with customers, addressing challenges related to process yields and variations throughout the semiconductor manufacturing process, from silicon wafers to final packaging. Operating primarily in the United States, Southeast Asia, China, Japan, and Europe, the company generates significant revenue from Taiwan and South Korea, leveraging its expertise to enhance product quality and reliability for its clients.

Vita Cassese

Board Member and Member of Audit Committee

3 past transactions

Lumina Instruments

Acquisition in 2024
Lumina Instruments specializes in the development and manufacturing of laser optical scanning equipment tailored for the growing glass market in high-tech applications. Founded in 2019 and headquartered in San Jose, California, the company provides innovative solutions that enhance yield and process management through its advanced thin-film defect detection capabilities. This technology enables businesses to effectively map and classify transparent, translucent, and opaque substrates of various shapes, thereby contributing to improved production efficiency and product quality.

Inspectrology

Acquisition in 2021
Inspectrology, LLC is a provider of optical metrology systems, serving the semiconductor, compound semiconductor, MEMS, and LED industries since 1983. Originally established as IVS and Schlumberger, the company has developed a strong international presence with offices across North America, Europe, and Asia, and maintains a significant installed base worldwide. Inspectrology specializes in overlay metrology, crucial for controlling lithography and etch processes in the compound semiconductor market. The company offers comprehensive support for all its metrology systems, including training, service contracts, preventative maintenance, and emergency services, ensuring high levels of customer satisfaction. Additionally, Inspectrology caters to diverse customer needs by providing systems suitable for various fabrication requirements and budgets, including re-manufactured options.

Nanometrics

Acquisition in 2019
Nanometrics is a prominent provider of advanced process control metrology and inspection systems, primarily serving the semiconductor and solid-state device fabrication industries. The company's automated systems are designed to measure critical dimensions, device structures, overlay registration, topography, and various thin film properties, including thickness and optical, electrical, and material characteristics. These integrated solutions are utilized throughout the fabrication process, from substrate manufacturing to high-volume production and advanced wafer-scale packaging applications. By implementing Nanometrics' systems, device manufacturers can enhance production yields, boost productivity, and reduce manufacturing costs. Headquartered in Milpitas, California, Nanometrics operates globally with sales and service offices to support its customers.
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